Addition polymerization toward the synthesis of photoresists for microlithography with carbon dioxide development Public
File Details
- Depositor
- rkati
- Date Uploaded
- 2019-04-12
- Date Modified
- 2019-04-12
- Fixity Check
- Fixity checks have not yet been run on this object
- Characterization
-
File Format: pdf (Portable Document Format)File Title: Microsoft Word - Chp4.docPage Count: 143File Size: 3205652Original Checksum: 70e1d2091a06bfe0bcac1d787eac5fc9Mime Type: application/pdf
| User Activity | Date |
|---|---|
| User rkati@ad.unc.edu has attached Addition polymerization toward the synthesis of photoresists for microlithography with carbon dioxide development to Addition Polymerization Toward the Synthesis of Photoresists for Microlithography with Carbon Dioxide Development |
|