High field asymmetric ion mobility spectrometry (FAIMS) is a gas phase separation technique that separates ions by the ratio of high to low electric field mobility, which is a characteristic of the three dimensional structure of ions. FAIMS separation in front of mass spectrometric analysis has the ability to reduce chemical noise thereby increasing signal-to-noise ratios and limits of detection; it can also be used to separate isobaric and isomeric compounds. FAIMS analyzers are simple to construct and are easily integrated into the atmospheric pressure ion source of current mass spectrometers without major modifications. The motivation of developing FAIMS analyzers in the Glish lab has been for the study of three dimensional gas phase ion structure of biological molecules, as well as to improve separation of compounds which are irresolvable using low resolution mass spectrometry and liquid chromatography. This dissertation does not focus on the application of FAIMS for structural elucidation, but instead on the development of a FAIMS device that combines excellent speed, resolution, and sensitivity in a simple to use small package. Described in the following chapters are the background for selection of gas phase ions by shape to charge, the development of a high amplitude asymmetric waveform power supply, modifications made the planar FAIMS device designed by the Pacific Northwest National Lab and the development of four generations of planar FAIMS devices. For each device limitations and flaws in the design are discussed along with proposed solutions and data demonstrating the results of modifications to analyzer design, and the successful construction of a planar FAIMS device with high speed, high sensitivity, and resolving power equal to much larger and more expensive devices.